É豸Ãû³Æ Equipment Name

¹ÜʽPECVDÉ豸  Horizontal PECVD

É豸ÐͺŠEquipment Model

PD-520/PD-520L/PD-520MAX

É豸ÓÃ; Equipment Application

SiN¡¢SiONµÈ±¡Ä¤³Á»ý¡£
Depositionof SiN, SiON ,etc.

¼¼ÊõÌØµã  Features

1¡¢¿É¿¿µç¼«½Ó´¥£¬ÓÐЧ¼õÉÙ·Û³¾¡¢½µµÍ¸ßƵ±¨¾¯Æµ´Î¡£

Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

2¡¢¼òµ¥¿É¿¿×Ô¶¯ÉÏÏÂÖÛ»ú¹¹£¬ÌáÉýÉ豸ά»¤¿Õ¼äÓë±ãµ±¡£
Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

3¡¢Ô˶¯²¿¼þµ¥Ãæ×°ÖÃά»¤£¬¼õÉÙÉ豸±³¿¿±³½á¹¹Õ¼µØÃæ»ýµÄͬʱ²»Ó°ÏìÉ豸ά»¤ÄѶÈ¡£
Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

4¡¢¸ßËÙƽÎÈÕûÌåÄ£×éÍÆÖÛ»ú¹¹¡£
High-speed and stable integral module boat pushing mechanism.

5¡¢¸¨Öú¼ÓÈÈרÀû¼¼Êõ¡£
Auxiliary heating patent technology.

6¡¢¿ìËÙ¶ÆĤ¹¤ÒÕ¼¼Êõ¡£
Rapid coating technology.

7¡¢×ÔÖ÷֪ʶ²úȨMESÈí¼þ¡¢ÖÐÑëÅÌËã»ú¼¯ÖпØÖÆϵͳ¡£
MES software & CCC system with independent intellectual property rights.

É豸²ÎÊý  Parameters