É豸Ãû³Æ Equipment Name

¹ÜʽPE-PolyÉ豸  Horizontal PECVD (Poly-Si)

É豸ÐͺŠEquipment Model

PD-520/PD-520L/PD-520MAX

É豸ÓÃ; Equipment Application

TOPConµç³ØËí´©Ñõ»¯²ã¡¢i-Poly¡¢D-poly³Á»ý¡£

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.

¼¼ÊõÌص㠠Features

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The tunnel oxide layer, i-poly, and D-poly layers can be coated in the same furnace tube which helps in reducing the process steps, improving the yield and lowering the breakage rate effectively.

2¡¢ÎÞÈȱÚÌØÐÔ£¬Ê¯Ó¢¹ÜʹÓÃÊÙÃü³¤¡£
Without hot wall effects, so quartz tube has a long service life. 

3¡¢ÈƶÆÇá΢£¬Ò×È¥³ý¡£
Slight wrap-around deposition which is easy to be removed.

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Precise doping; available to introduce other efficiency-enhancing doping elements, suitable for process expansion and large space for efficiency improvement.

5¡¢·Àµ¼Í¨×¨Àû¼¼Êõ¡£
Patented anti-conduction technology.

É豸²ÎÊý  Parameters