设备名称 Equipment Name

管式PE-Poly设备  Horizontal PECVD (Poly-Si)

设备型号 Equipment Model

PD-520/PD-520L/PD-520MAX

设备用途 Equipment Application

TOPCon电池隧穿氧化层、i-Poly、D-poly沉积。

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.

技术特点  Features

1、隧穿氧化层、i-poly、D-poly三合一同管完成，减少工艺环节，有效提升良率、降低碎片率。

The tunnel oxide layer, i-poly, and D-poly layers can be coated in the same furnace tube which helps in reducing the process steps, improving the yield and lowering the breakage rate effectively.

2、无热壁特性，石英管使用寿命长。
Without hot wall effects, so quartz tube has a long service life. 

3、绕镀轻微，易去除。
Slight wrap-around deposition which is easy to be removed.

4、精准掺杂、可引入其它提效掺杂元素，工艺拓展、提效空间大。
Precise doping; available to introduce other efficiency-enhancing doping elements, suitable for process expansion and large space for efficiency improvement.

5、防导通专利技术。
Patented anti-conduction technology.

设备参数  Parameters